Layer S≤1㎡ 1㎡ 3 5 10 30 50㎡ 100㎡ 300㎡<S 2 fẹlẹfẹlẹ 4 7 7 8 8 9 10 12 RFQ 4 fẹlẹfẹlẹ 5 8 8 9 9 10 11 13 6 fẹlẹfẹlẹ 6 9 9 10 10 11 12 14 8 fẹlẹfẹlẹ 7 10 10 11 11 12 13 15 10 fẹlẹfẹlẹ 8 11 11 12 12 13 14 16 12 fẹlẹfẹlẹ 9 12 12 13 13 14 15 17 ≧14 fẹlẹfẹlẹ RFQ